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|
| 产品名称： |
OC/OG负型光阻剂 |
| 产品型号： |
KR-2S701 |
| 规格尺寸： |
Spin-coater &Slit-coater |
| 出厂年份： |
2012.06.01 |
| 产品用途： |
TP制程ITO绝缘保护光阻 |
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| |
| 产品说明： |
| 耐蚀刻性 |
| 5%NaOH |
Dip |
25℃ |
30min |
OK |
| IPA |
Dip |
25℃ |
30min |
OK |
| NMP |
Dip |
25℃ |
30min |
OK |
| GBL |
Dip |
25℃ |
30min |
OK |
| TMAH |
Dip |
25℃ |
30min |
OK |
| 结论 |
|
|
惠乐 |
其它社 |
| 粘度(mpas) |
6.54 |
6.44 |
| 感度(mj) |
50 |
50 |
| 透过率 |
>97% |
>98% |
| 耐热透过率 |
>95.5% |
>96% |
| 显影密着性 |
OK |
OK |
| 后烘密着性 |
OK |
OK |
| 耐化性 |
OK |
OK | |
| 工艺条件 |
| 前烘 |
90℃ |
| 曝光 |
50mj |
| 显影 |
DEV-KOH1001 /50s |
| 后烘 |
235℃/30min | | |
| |
| 产品联系人：任先生 |
| 联系电话：0755-89800161-8016 |
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