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产品名称: |
OC/OG负型光阻剂 |
产品型号: |
KR-2S701 |
规格尺寸: |
Spin-coater &Slit-coater |
出厂年份: |
2012.06.01 |
产品用途: |
TP制程ITO绝缘保护光阻 |
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产品说明: |
耐蚀刻性 |
5%NaOH |
Dip |
25℃ |
30min |
OK |
IPA |
Dip |
25℃ |
30min |
OK |
NMP |
Dip |
25℃ |
30min |
OK |
GBL |
Dip |
25℃ |
30min |
OK |
TMAH |
Dip |
25℃ |
30min |
OK |
结论 |
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惠乐 |
其它社 |
粘度(mpas) |
6.54 |
6.44 |
感度(mj) |
50 |
50 |
透过率 |
>97% |
>98% |
耐热透过率 |
>95.5% |
>96% |
显影密着性 |
OK |
OK |
后烘密着性 |
OK |
OK |
耐化性 |
OK |
OK | |
工艺条件 |
前烘 |
90℃ |
曝光 |
50mj |
显影 |
DEV-KOH1001 /50s |
后烘 |
235℃/30min | | |
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产品联系人:任先生 |
联系电话:0755-89800161-8016 |
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